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316L EP Seamless Tube
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316L EP Seamless Tube
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Technical Specifications
Material
316L VIM+VAR / VOD
Roughness
ASTM Ra ≤ 10 µ-in · JIS Ra ≤ 5 µ-in
Oil residue
< 0.01 mg/ft²
Length
4000 / 6000 mm
Standards
ASTM A269, SEMI F19
Available sizes
1/4” – 4” (and pipe A sizes per capability table)
Key Features
- Electropolished to Ra ≤ 10 µ-in (ASTM) / Ra ≤ 5 µ-in (JIS) — minimum particle-trapping surface finish
- 18 MΩ DI-water final rinse, cleanroom bagged and nitrogen-sealed at factory
- Oil residue < 0.01 mg/ft² — meets SEMI F19 hydrocarbon cleanliness limit
- VIM+VAR melt option for ultra-low metallic impurities — for the most critical semiconductor fab lines
- Cr/Fe ratio ≥ 2.0 (SEMI F19-0304 ≥ 1.5) — stable passive chromium-oxide protective layer
Suitable Industries
Semiconductor & Microelectronics
EP/BA tubes are specified for wafer fab gas delivery (N₂, Ar, H₂, specialty gases) where SEMI F19 particle and metallic contamination limits apply.
Pharmaceutical & Biotech
Used in WFI (Water for Injection) loops, purified water distribution, and process gas supply in cGMP pharmaceutical and bioprocessing facilities.
Optoelectronics & TFT-LCD
High-purity gas distribution (N₂, Ar, NF₃) for TFT-LCD and OLED panel fabs — BA/ECB grades cover large-bore bulk distribution cost-effectively.
Research & Laboratories
Ultra-pure gas delivery for analytical instruments (GC, MS, ICP-MS), specialty gas manifolds, and university research cleanrooms.